Abstract
In this paper we present an oscillating conditioning circuit, operating a capacitance-to-time conversion, which is suitable for the readout of differential capacitive sensors. The simple architecture, based on a multiple-feedbacks structure that avoids ground noise disturbs and system calibrations, employs only three Operational Amplifiers (OAs) and a mixer implementing a square wave oscillator that provides an AC sensor excitation voltage. It performs a Period Modulation (PM) and a Pulse Width Modulation (PWM) of the output signal proportionally to the sensor differential capacitance values. The sensor variation range and the detection sensitivity can be easily set through the additional resistors. Preliminary PSpice simulation results have shown a good agreement with theoretical calculations as well as a linear response with a high detection sensitivity of differential capacitive sensors having a baseline in the range [2.2 ÷ 180 pF]. Moreover, different experimental measurements have been also performed by implementing the circuit on a laboratory breadboard using commercial discrete components so validating the idea and providing the circuit performances with different kind of differential capacitive sensors achieving detection resolutions of about 0.1 fF in an overall differential capacitive variation range that is equal to ±15.8 pF. The achieved results demonstrate that the proposed interface solution is suitable for on-chip integration with different kinds of differential capacitive sensing devices, such as Micro-Electro-Mechanical-System (MEMS), force/position, and humidity sensors in biomedical and robotics applications.
Highlights
Recent developments on integration techniques and circuit miniaturizations, together with advances on capacitive sensing technologies, have led to the design of high-sensitivity and small-size devices, like Micro-Electro-Mechanical-System (MEMS), gyroscopes, accelerometers, position/displacement, pressure/force, flow, and humidity sensors having very high detection capabilities that are widely used in robotics/biomedical sensor applications as well as in bioengineering microsystems [1–3]
Electronics 2019, 8, 80 capacitors showing limited/reduced detection ranges, sensitivities, and resolutions mainly due to noise issues. The latter approach is typically based on square wave relaxation oscillators in which the sensing operation is performed by the readout of the output signal period and/or its duty-cycle as a function of the single/differential sensor capacitance
The sensor variation range and the detection sensitivity can be set through the employed resistors
Summary
Recent developments on integration techniques and circuit miniaturizations, together with advances on capacitive sensing technologies, have led to the design of high-sensitivity and small-size devices, like Micro-Electro-Mechanical-System (MEMS), gyroscopes, accelerometers, position/displacement, pressure/force, flow, and humidity sensors having very high detection capabilities that are widely used in robotics/biomedical sensor applications as well as in bioengineering microsystems [1–3]. Electronics 2019, 8, 80 capacitors showing limited/reduced detection ranges, sensitivities, and resolutions mainly due to noise issues On the contrary, the latter approach is typically based on square wave relaxation oscillators in which the sensing operation is performed by the readout of the output signal period (i.e., a Period Modulation, PM) and/or its duty-cycle (i.e., a Pulse Width Modulation, PWM) as a function of the single/differential sensor capacitance. PM-based interfaces are asynchronous and have a measurement time and a resolution generally dependent from the sensor capacitance
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