Abstract
We have developed a capacitance displacement sensor based on the elastic deformation of a 150 μm thick diaphragm made up of Cu0.98Be0.02. Displacements up to 50 μm can be detected. The resolution is about 0.1 nm. The time dependence of the dilatation of a relaxor-ferroelectric (Sr0.61Ba0.39)Nb2O6 single crystal after removing an electric field is investigated using this sensor.
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