A calculation method for workpiece profile variation during double-sided lapping by considering workpiece elastic deformation

Abstract

A calculation method for workpiece profile variation during double-sided lapping was developed in this study. In this method, shell element in FEM deformation was used to formulate elastic deformation of workpiece, and spring element was used to formulate the contact between workpiece and platens to calculate distribution of their contact pressure considering workpiece elastic deformation. First, the developed method of the contact pressure distribution was evaluated by comparing with a method using a FEM software and the existing methods, and was confirmed to be quite valuable in terms of applicable process and calculation time. Subsequently, the workpiece profile variation was calculated using the developed method for several workpiece conditions, and it was clarified that the uneven workpiece thickness can be modified by the process, but it is difficult to modify the bow shape when the workpiece is not small. Furthermore, the decrease of the load applied to the workpiece was suggested to modify the bow shape of the workpiece.