Abstract
A bubble-assisted electroosmotic (EO) micropump is proposed as a miniaturized actuating element to be integrated in a microfluidic chemical sensing system. In this device, a bubble is generated in a narrow channel to form a thin water sheet between the bubble and the wall. Due to the high surface-to-volume ratio of the water sheet, an efficient EO flow is realized at relatively low pumping voltages of 20–60V without using a porous material. The direction and the flow rate of the EO flow depended on the polarity and the magnitude of the pumping voltage, and the highest flow rate of about ±500pL/s was obtained at ±60V. A bubble-assisted EO micropump was combined with a LAPS for measuring the pH value of a droplet with a volume of 1nL.
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