Abstract
An automated method for measuring the complex permeability of anisotropic thin magnetic films over a broad frequency band is described. The method is based on the measurement, by a network analyser, of scattering matrix elements of a rectangular coaxial transmission line loaded by the sample. The sample is deposited onto a nonmagnetic substrate, so that the measured S parameters are characteristic of the total transverse section of the line. To relate those measured values to thin-film permeability, a numerical resolution of Laplace's equation in a quasi-TEM approximation is used. Results showing the complex permeability of CoZr thin films versus frequency for different orientations of the magnetic exciting field, obtained by this method, are presented.
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