Abstract
This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.
Highlights
Surface form measurement is important in engineering applications [1]
Interferometry is a superior technique for measuring simple surfaces such as spheres, planar surfaces, and weakly aspheric surfaces, but has difficulty in measuring complicated aspheric mirrors or free-form specular objects because a reference surface is required during measurement [8–12]
Phase measuring deflectometry (PMD) is a famous deflectometry technique that is based on phase calculation [23–49, 51, 52]
Summary
Surface form measurement is important in engineering applications [1]. Fringe projection technologies are widely used for diffused surface form measurement [2–4]. As an alternative technology for measuring surface form of specular objects, PMD has been studied by many researchers. Due to the application of sinusoidal fringe patterns and phase techniques, PMD has a high dynamic range, and high measurement accuracy and solution compared to other deflectometry technologies [13–22]. With known phase difference Δφ between Q0 and Q1, the gradient of the measured surface can be obtained according to Eq (1).
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