Abstract

A black phosphorus humidity sensor with high sensitivity and fast response is reported in this paper. A thin black phosphorus film as the sensitive layer was deposited on an interdigital structure by spin-coating so that the film thickness could be controlled. According to the test results, a BP film with the thickness of 77nm was developed by spin-coating at the rotation rate of 3000r/min. High sensitivity and fast response was observed in the experiment, which was about 11.8kΩ/%RH and 3s respectively at the test frequency of 10 kHz. The max hysteresis of the sensor was about 4%RH.

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