A black phosphorus humidity sensor with high sensitivity and fast response

Wen-Hao Chen,Qing-An Huang,Jian-Qiu Huang,Chong-Yang Zhu

doi:10.1109/icsens.2016.7808462

A black phosphorus humidity sensor with high sensitivity and fast response

Wen-Hao Chen, Qing-An Huang + Show 2 more

https://doi.org/10.1109/icsens.2016.7808462

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Publication Date: Oct 1, 2016

Citations: 11

Affiliation: Southeast University

#High Sensitivity Response #Fast Response + Show 8 more

Abstract
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Abstract

A black phosphorus humidity sensor with high sensitivity and fast response is reported in this paper. A thin black phosphorus film as the sensitive layer was deposited on an interdigital structure by spin-coating so that the film thickness could be controlled. According to the test results, a BP film with the thickness of 77nm was developed by spin-coating at the rotation rate of 3000r/min. High sensitivity and fast response was observed in the experiment, which was about 11.8kΩ/%RH and 3s respectively at the test frequency of 10 kHz. The max hysteresis of the sensor was about 4%RH.

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