Abstract
In this paper the layout, fabrication, and characterization of a first-of-its-kind bistable 3/2-way shape memory microvalve are presented. A symmetric arrangement of two counteracting shape memory alloy (SMA) microbridges is used for switching. The stable states in power-off condition are realized by magnetostatic contact forces between a movable hard-magnetic cylinder and two soft-magnetic layers. A detailed design study of the magnetic retaining system is performed to meet the requirements of a large pressure range and identical flow rates in the open valve state and a low leakage in the closed valve state in both outlet ports. The overall dimensions of first demonstrators are 11mm×6mm×4mm. The 3/2-way bistable microvalve performance is demonstrated, showing identical flow rates in both outlet ports for a pressure difference up to 200kPa for gas (N2) and up to 100kPa for liquid (water) with flow rates of 1250sccm and 11ml/min, respectively.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
