Abstract
A novel concept and various layouts of a bistable microswitch are presented,that combine an antagonistic shape memory alloy (SMA) actuation mechanismwith two end positions, and magnetic components to maintain the endpositions in the power-off state. The antagonistic SMA actuation mechanismconsists of two mechanically coupled freely suspended TiNi microbridges of 20 µm thickness that are pre-strained with respect to each other. The electro-thermo-mechanicalresponse of the coupled microbridges is investigated for various degrees of pre-strain todetermine the maximum actuation stroke, minimum required magnetic retention force andmaximum switching force. Different layout variants consisting of hard- and soft-magneticmicrostructures are compared and evaluated for magnetic retention. The optimization ofthe ferromagnetic attraction force of a specific layout is shown by finite elementsimulations. First demonstrator microswitches with outer dimensions of about7 × 7 × 4 mm3 are presented that show large work outputs featuring strokes and contact forces up to 84 µm and 30 mN, respectively.
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