Abstract
Several groups have proposed microfluidic chips as small test benches to evaluate the effect of fluid force on platelet production. The conventional method is difficult to trap megakaryocytes (MKs) of various size without clogging MKs. Therefore, we proposed a 3D microchannel for applying equalized fluid force. We fabricate the 3D microchannel by using grey-scale lithography technique and DRIE including O 2 plasma ashing process. As a result, we succeeded in fabrication of high resolution 3D microchannel.
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