Abstract

The liquid phase heteroepitaxial growth on predefined crystalline substrate is studied with binary phase field crystal (PFC) model. The purpose of this paper focuses on changes of the morphology of epitaxial films, influences of substrate vicinal angles on epitaxial growth, characteristics of islands growth on both sides of the substrate as well. It is found that the morphology of epitaxial films undergoes the following transitions: layer-by-layer growth, islands formation, mismatch dislocations nucleation and climb towards the film-substrate interface. Meanwhile, the density of steps and islands has obviously direct ratio relations with the vicinal angles. Also, preferential regions are found when islands grow on both sides of the substrate. For thinner substrate, the arrangement of islands is more orderly and the appearance of preferential growth is more obvious than that of thicker substrate. Also, the existing of preferential regions is much more valid for small substrate vicinal angles in contrast for big substrate vicinal angles.

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