Abstract
We present a model for the behavioural description of resonant cantilevers for chemical sensing. This model is well suited to be implemented in an analog behavioural description language like Verilog-A to enable simulations of the cantilever devices together with integrated electronic circuits. The model is based on the assumption that the resonant cantilever can be described as a plate, with three free and one clamped end; we suppose the damping force acting on the structure is due to air friction and to the viscoelastic behaviour of the polymer used as sensitive layer. We have validated the model by modal FEM analysis (ANSYS? ) and by measurements with a dynamic signal analyzer (DSA). Simulations with the Spectre? circuit simulator, including the cantilever device and integrated feedback electronics, have been carried out and show good agreement with the measured transient behaviour of the cantilever devices.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
