Abstract
Abstract The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer by which can improve appropriate distance for optical fiber coupling. The silicon-based optical coupling platform consists of the self-parking framework (including flat-topped mesa and intersection of two v-grooves) and micro-ball lens array for optical fiber coupling purpose. The structure of optical coupling platform is able to improve distance between fiber and micro-ball lens and to increase coupling efficiency. Optical measurement reveals an insertion loss below 2.5dB with wavelength 635nm in single-mode fiber. The micro-ball lens array is batch fabricated by polymeric material and thick photoresist, and then bonded them onto flat-topped mesa correspondently that adjoins to the v-groove. The corner compensation offers a method to fabricate flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens, but also reduces micro-assembly cost.
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