Abstract
The results of our experimental study on a back-diffusion type ion source, which can be operated in any kind of gas at a pressure from 10 -6 to 10 -3 Torr, are described. The source produces monoenergetic ions with a controllable kinetic energy from a few tens to several hundreds eV and density up to several times 10 7 cm -3 . The monoenergetic ions are neutralized by thermal electrons emitted from cathodes and hardly diverge during their run. They are available for the calibration of energy analyzers, experiments on collision processes of ions with atoms and so forth.
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