Abstract
We have constructed a prototype scanning gun microscope which uses 65 keV hydrogen ions as a probe. A field ionization ion source, consisting of a tungsten tip (∼ 1000Å radius) cooled to 78° K in an H2 atmosphere, yields H+ and H2+ ions, which are then accelerated and focused by a two-electrode accelerating lens. The spot is deflected electrostatically to scan the specimen and the transmitted particles are detected by a continuous-dynode electron multiplier.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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