Abstract

A 4Kx8 innovative fuse (I-fuse) <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1</sup> one-time programmable (OTP) based on a 1R1T metal-gate fuse with a strictly electromigration program mode has a 0.744 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> cell and 111 μm × 411 μm macro on 22-nm FD-SOI. This macro can be programmed at 1.0-1.45 V with <;1.4 mA and read at 0.42 V at 1 MHz and has high data security and full testability. The I-fuse is based on a revolutionary concept by programming below thermal runaway and above the electromigration threshold to achieve the best figures of merit in all OTP categories.

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