A 3D fiber probe based on orthogonal micro focal-length collimation and fiber Bragg grating

Abstract

A 3D fiber probe is proposed for the precision measurement of micro parts with high aspect ratios. The probing system consists of two measuring systems: two mutually orthogonal micro focal-length collimation optical paths for the radial tactile probing measurement, and a matched fiber Bragg grating (FBG) pair interrogation system for the axial tactile probing measurement. The fiber probe consists of a fiber stylus and a probe tip, the fiber stylus works as a micro focal-length cylindrical lens, and the FBG inscribed in the fiber stylus works as a measuring FBG. The radial displacement of the probe tip is transformed into the centroid position shift of the two mutually orthogonal micro focal-length collimation optical paths; the axial displacement of the probe tip is transformed into the power ratio change of the matched FBG pair interrogation system. Experimental results indicate that the probe has a radial sensitivity of 71 pixel μm−1 in both X and Y directions, and an axial sensitivity of 4.9% μm−1 in Z direction; the probe can reach a radial resolution of 5 nm, and an axial resolution of 8 nm. The probe has a capability of decoupling the 3D tactility and it can be applied in the measurement of micro parts.