Abstract
The paper presents dynamic 3D finite element simulation of stress and deformation of growing thin-walled, polygonal tubes. As an example, the growth of octagonal silicon tubes by the edge-defined film-fed growth (EFG) method is chosen. In tubes with wall thickness in the order of several 100 μm the increasing strain energy during growth is periodically reduced by deflections of the walls at regular intervals. The influence of various temperature profiles on the deflection behavior is studied. The applicability of this model to the EFG growth of silicon octagons is discussed by means of experimental observations.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
