Abstract

Stick-slip piezoelectric actuators are widely used in precision engineering due to their high accuracy and small size. However, most of these actuators achieve multi-DOF motion by serially connecting multiple units, resulting in a non-compact structure and large assembly errors.To resolve this issue, this paper proposes a spherical actuator consists of a rotor and four drive units distributed around the rotor. Each drive unit comprises a piezoelectric shear stack and a piezoelectric plate. By utilizing the cooperation of piezoelectric elements, various driving modes with different performance and control complexity can be switched. To understand the influence of position and orientation of the drive units on the actuator’s performance, a dynamic model describing the behavior of the proposed actuator is established. This model takes into account the behavior of the drive units, friction and motion transmission between the drive units and the rotor, as well as transformation of coordinates. Finally, a prototype is developed based on the design, and the three-DOF motion performance of the prototype is tested under different drive modes. This work contributes to the mechanical design of multi-DOF precision positioning devices and the study of motion modes.

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