Abstract
In this work, 3-D finite element models (FEM) based on a ~100 MHz YZ-LiNbO3 piezoelectric substrate coated with a thin Pd sensing layer was simulated to gain insights into the H2 sensor response. Literature suggests that structural and morphological changes due to gas absorption occurring at the molecular scale affect the material properties of the sensing layer which in turn affects the wave propagation at macro- scale. The changes in the material properties of the sensing layer on gas exposure were used to simulate the behavior of a SAW sensor. Frequency responses of the displacement and voltage waveforms generated at the output IDT nodes were used to quantify the effects of gas interaction. Additionally, 2-D FEM simulations of modified sensing layers involving micron- sized gratings have also been carried out and compared with results obtained using thin films. This study demonstrates the effectiveness of finite element models in understanding gas sensor response.
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