Abstract
A fully integrated DC-DC converter based on electromagnetically coupled class-D LC oscillators achieving 0.42-3.2W/mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> power density and 69.4-78.1% efficiency is demonstrated in a 22nm FDSOI CMOS technology. This work proposes on-chip 8-shaped and vertically stacked transformers, which are orthogonally placed for the high-power density, low undesired coupling coefficient and small electromagnetic interference (EMI) radiation. In addition, the output ripple is <10mV without attaching any output capacitor thanks to the 4-phase electromagnetic power delivery scheme. The converter also offers a duty cycled operation mode that enables <2% efficiency degradation down to 100μW. The total chip area is 0.59mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> for 5.9nH inductance (high efficiency version) and 0.22mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> for 3.9nH (high power density versions).
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