A 12–18 GHz electrostatically tunable liquid metal RF MEMS resonator with quality factor of 1400–1840

Abstract

Summary form only given, as follows. In this paper we present a novel tunable RF MEMS resonator that is based upon electrostatic control over the morphology of a liquid metal droplet (LMD). We demonstrate a LMD evanescent-mode cavity resonator that simultaneously achieves wide analog tuning from 12 to 18 GHz with a measured quality factor of 1400–1840. A droplet of 250-um diameter is utilized and the applied bias is limited to 100V. This device operates on a principle called Electro-Wetting On Dielectric (EWOD).