Abstract
A new 128 elements pMUT-based phased array ultrasound transducer for medical imaging applications is described for the first time. The active area of the transducer has a dimension of 26 mm long by 10.4 mm wide. There are 6270 pMUTs in the transducer and each pMUT has a membrane diameter of and the pitch between each two elements is. The transducer has a −3dB and −6dB bandwidth of 118% and 184%, respectively, with a center frequency of 1.5 MHz. The bandwidth is higher than any previously reported transducer in any technology, such as bulk-PZT, pMUT, or capacitive MUT (cMUT). The transducer benefits from a high transmission and receive sensitivity of 430 Pa/V @ 3 cm and 190 mV/MPa, respectively.
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