A 120-GHz Electrical Interferometer for Contactless Permittivity Measurements With Direct Digital Read-Out

Abstract

This work describes an electrical interferometer for contactless permittivity measurements working at 120 GHz. It was fabricated in a 130 nm SiGe process featuring an ft and fmax of 240 and 330 GHz. The on-chip system contains a 120 GHz VCO with a tuning range of 7 GHz featuring a divide-by-64 circuit to enable external PLL operation. The subsequent buffer provides 7 dBm of output power at 120 GHz. Additionally, the IC contains high-precision and high-resolution phase shifters based on a slow-wave transmission line approach with digital control for direct readout ability. A 120 GHz LNA with 17 dB gain and a power detector to provide DC output signals were realized on chip. It enables sample emulation capability by phase shift inducement in the measurement as well as a reference transmission line. In terms of phase detection, the system shows a sensitivity of 907.36 MHz/°.