Abstract

This brief presents a 0.9- $\mu \text{W}$ duty-cycle-modulated temperature sensor with a sub- $\mu \text{A}$ peak current for energy harvester- or micro-battery-powered systems. A compact sensing frontend is proposed to achieve low power, together with various device-level leakage and nonlinearity compensation techniques adopted to minimize the sensor error. In addition, a current-starved multivibrator which provides inherent clamping voltages is used for duty cycle modulation for overall energy savings. The sensor designed in 0.18- $\mu \text{m}$ CMOS process achieves a resolution figure of merit of 10.6 pJ $\cdot \text{K}^{2}$ , which is among the most energy-efficient designs to date. Trimmed at 30 °C, the sensor achieves ±0.85 °C precision from −30 °C to 120 °C. The maximum supply sensitivity is 0.7 °C/V for a 1.6–2 V supply.

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