A 0.9-μm² 1T1R Bit Cell in 14-nm High-Density Metal Fuse Technology for High-Volume Manufacturing and In-Field Programming

Abstract

This paper introduces the first high-volume manufacturable (HVM) metal-fuse technology in a 14-nm trigate high-k metal-gate CMOS process. A high-density array featuring a 0.9-μm² bit cell with an efficient bit level redundancy scheme is presented. An array efficiency of over 53% is achieved through hierarchical bitline design by minimizing the impact of parasitic resistance on fuse programming through short local bitline and sharing sense amplifier through longer global bitline. A power gating-based scheme is adopted to reduce leakage current consumption and high-voltage exposure to minimize reliability concern. Program conditions can be optimized for HVM and in-field programming to achieve close to 100% unit level yield with the proposed redundancy scheme.