Abstract
We measured the elastic constants of nanocrystalline-diamond (NCD) thin films and microcrystalline-diamond (MCD) thin films deposited on a silicon substrate by the chemical-vapor-deposition (CVD) method using resonant-ultrasound spectroscopy coupled with laser-Doppler interferometry. The elastic constants of the diamond thin films are smaller than those of a bulk diamond and the elastic constants of the NCD films are smaller than those of the MCD films. The elastic constants of the NCD film show a thickness dependence; thinner NCD films show smaller moduli. We attribute the elastic constants to incohesive bonds at grain boundaries and presence of thin graphite and amorphous diamond phases, which are suggested by Raman spectroscopy. The modified elastic constants are explained by a micromechanics modeling.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callSimilar Papers
More From: The Proceedings of Conference of Kansai Branch
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
