Abstract

Data are presented on 901 nm lithographic vertical-cavity surface-emitting lasers (VCSELs) demonstrating high efficiency for small VCSEL sizes, and stable beam patterns. Power conversion efficiency >40% is obtained for VCSELs ranging in size from 6 to 2 µm diameter. The 2 µm diameter VCSELs produce output powers in excess of 6.5 mW, and produce single-lobed far-field radiation patterns over the full range of operation.

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