Abstract
Gas sensor structure based on rf sputtered SnO2 thin film is found to be highly sensitive (1.4x10 4 ) towards 100 ppm NO2 gas, but with slow response (~4min.) and recovery (~33min.) times. To improve the response and recovery speeds of the sensor, different catalysts (WO3, TeO2, Al2O3, NiO, CuO and In2O3) in the form of nanoclusters have been deposited over SnO2 surface and their effect towards sensing response characteristics of NO2 gas has been studied. Amongst all the catalysts WO3 nanoclusters are found to be yielding a high response (5.1x10 4 ) for low concentration of NO2 gas at a low operating temperature of 100 o C with a fast response and recovery times of 67sec and 17 min respectively.
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