Abstract
AbstractWe have demonstrated that DLC coated Mo FEAs are very stable under operation when the hydrogen‐free DLC film is deposited by a layer‐by‐layer deposition technique using PECVD. In order to optimize the preparation condition of the DLC film, the thickness of the DLC layers on the Mo tips were changed from 10 nm to 100 nm. The turn‐on voltages for pure Mo‐tip FEAs are about 60, and 51, 46, 54 and 78 V for thickness of 10, 20, 50 and 100 nm, respectively. In addition to the decrease in turn‐on voltage, the anode current is also increased by adopting a DLC layer on Mo FEAs except for the case of the 100 nm thick DLC coating. Therefore, it is confirmed that the operating voltage of Mo FEAs can be remarkably decreased by DLC coating. Furthermore, the emission patterns from a layer‐by‐layer DLC coated FEAs were found to be more stable compared to conventional Mo FEAs.
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