Abstract
AbstractLow‐Temperature Polycrystalline Silicon (LTPS) is the enabling backplane technology for AMOLED displays and small to medium sized high‐resolution AMLCDs. Recently, Excimer Laser Annealing (ELA) equipment has made significant progress in scaling for cost‐effective large‐scale production. In this paper, we discuss the key elements of ELA equipment and the recent and future milestones for LTPS on large substrates.
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