7AM2-D-1 MEMS技術を用いた水晶振動子荷重センサの製作(7AM2-D センサと計測)

Abstract

Now, high sensitive, wide-measurement range, high-speed response and small size (as whole system) load sensors are desired in many fields, such as medical field, life support robots and industrial robots. Therefore, in this paper, we develop a compact load sensor using AT-cut quartz crystal resonator whose resonance frequency changes under external force, and features high sensitivity, a wide measurement range, high-speed response, and superior temperature and frequency stability. We design a quartz crystal resonator sensor to increase its sensitivity and to reduce the whole volume of the packaged sensor. We made the quartz crystal sensor and the sensitivity was increased from 574Hz/N to 896Hz/N and the volume was reduced from 423mm^3 to 226mm^3. We designed and fabricated a package of the sensor which has a mechanism of pre-loading of the quartz crystal sensor.