Abstract
76X nm single-mode and single-polarization VCSELs with extended tuning range of 10 nm are presented, which prove very suitable for the Tunable Diode Laser Absorption Spectroscopy (TDLAS) application. The broad tuning range covers both major absorption line bands for Oxygen around 761 nm and 763 nm. The VCSELs are discussed in terms of design, manufacturing, performance, and reliability aspects. Tuning coefficients are 0.5 nm/mA and 0.053 nm/K, typical for small aperture oxide confined VCSELs and the AlGaAs material system, respectively. The wide operating temperature range of up to 150 K, e.g., output power of more than 0.1 mW and threshold currents below 0.9 mA between -30°C and +120 °C, in combination with a sophisticated two stage thermo-electrical element (TEC) in a compact TO39 package, which allows for wide range temperature control, is an excellent match to the requirements set by TDLAS oxygen sensing.
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