Abstract
In-home healthcare and smart nursing are significantly important in recent years due to the population aging problem and the lacking of human resources. This paper therefore presents a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator for trace amount of chemicals detection as well as for recognition of gas molecular from human breath. The disk exhibits excellent quality factor and therefore high sensitivity besides its low driving voltage and low power consumption advantageous. It is a promising candidate to be integrated in micro electromechanical systems (MEMS) and wireless sensor network (WSN) for in-home personal healthcare application.
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