Abstract
We originally develop a measurement method for determining anisotropic elastic constants of thin films on substrates. It uses free-vibration resonance frequencies of a film/substrate rectangular parallelepiped specimen, which depend on dimensions, mass density and elastic constants of the film and substrate; film's elastic constants are inversely determined from the resonance frequencies. We measure the resonance frequencies with a high accuracy using a piezoelectric tripod transducer, consisting of needle-type transducers for generation and detection of vibration. Detected resonance peaks are identified by measuring the displacement distribution on the vibrating surface using laser-Doppler interferometer. We applied this method to copper and CVD diamond thin films. Their elastic constants show elastic anisotropy between the in-plane and out-of-plane directions. We attribute it to incohesive bonds at grain boundaries. This view is supported by micromechanics calculations.
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