Abstract
In the micro-electric discharge machining (μ-EDM), it is thought to be difficult to achieve nano-accuracy finishing because of its machining principle and severe electrode wear. Under such circumstance, this study aims to fabricate the micro-structures with high-accuracy by μ-EDM. In this report, the fabrication experiments of micro-grooves were conducted to the stainless workpieces with Cu-W fine electrodes to investigate the mechanism of the electrode wear that became important for three dimensional structure formation. Also, the coarse and fine planetary motion machining was proposed and performed to fabricate the layer structure. As a result, its effectiveness was confirmed.
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