Abstract
This paper reports the design, a part of the fabrication process, especially ion doping method by oblique ion implantation, and experimental results of a 6-axis force-torque sensor chip composed of 16 piezoresistive beams. The sensor chip's area, 2mm square in size, is one-third of that of the minimum 6-axis sensor chip ever reported. It will enhance the mounting density of sensor array and also reduce the cost in case of volume production. These sensor chips were fabricated by MNOIC, 8-inch MEMS foundry in Japan, and their characteristic variations are enough small to make practical use of them.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
