Abstract
It is important in AMOLED pixel forming process to reduce low angle region flux of particles emitted from thermal evaporation source. Because it can cause the mask shadow effect, nozzle clogging and material waste. We developed Collimating and Recycling source. It has unique nozzle structure that can make low angle flux go down to recycling basket and pass only high angle flux through final nozzle. It can make collimating flux that is similar with cosine to the tenth. And it can recycle material 70%.
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