Abstract
In the present work we developed advanced system for not only diagnosing but also predicting the impact resistance of flexile display panel by evaluating residual stress of Mo thin film with non‐destructive X‐ray diffraction. The impact resistance property of flexible display was dominantly affected by the residual stress of Mo thin film. When Mo thin film has the compressive residual stress, the panel has a tolerable impact resistance. In contrast, the panel has a poor impact resistance with tensile residual stressed Mo thin film. Therefore, precisely controlled the Mo thin film residual stress can be able to design robust flexible display panels.
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