Abstract
Manufacturing yields at Generation 6/7/8 TFT-LCD fabs will be a key determinant of LCD TV production costs. Electrical testing of the completed transistor array (“array test”) is a critical element of every manufacturer's yield management strategy. Array test equipment vendors face a number of daunting and seemingly contradictory demands from panel makers — faster throughput and better detection despite larger glass and more complicated pixel structures. Meeting these demands requires innovation in test technology and methodology as well as in mechanical design and operation. This paper describes a few of the technical developments and platform improvements pursued by AKT's electron-beam array test group (EBT) as it seeks to meet the challenge of testing large LCD TVs.
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