Abstract
Canon Tokki has developed a vapor deposition system for OLED mass production. The Substrate size is G6H (half‐size generation six (G6)) panel compatible, cluster type equipment, and productivity of 15k sheets per month (G6 size conversion). We have also developed an in‐line system for OLED‐TV production on G8H size panels and vertical G6F (full‐size G6 panel) equipment to meet future demands
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