56.3: High Speed Flatbed Scanner for Large Format Display Manufacturing

Abstract

AbstractSubstrate sizes in the Flat Panel Display (FPD) industry are constantly rising as manufacturers try to lower manufacturing costs and meet the ever growing demand for larger screens. The current forecast for Generation 7 (Gen 7) Liquid Crystal Display (LCD) mother‐glass format size is that it would exceed 2000 × 2000 mm. This situation poses a serious challenge to equipment manufacturers, and specifically to digital imaging equipment manufacturers, who need to find new methods to move these substrates at high speeds in order to achieve desired throughput levels.The conventional approach of supporting a substrate by a rigid chuck is not desirable since, for these large substrates, the moving mass becomes prohibitively large.A team in Creo Inc. has developed a novel approach where the moving substrate is supported by a lightweight flexible carrier which travels on an air‐bed (as in an “Air‐Hockey” table). Initial test results show that with such approach one could achieve excellent dynamic stability in a compact and lightweight system. Additional benefits include simpler motor design and thermal load management The concept together with test results will be presented.