Abstract

The formation of many carbon nanotube (CNT) tips with small diameter on the surface of thick CNTs was investigated to improve the field-emission uniformity of a CNT emitter. A CNT layer was first grown on a metal substrate by thermal-chemical vapor deposition (CVD). CNTs in the layer were multiwalled nanotubes with diameter of 30 – 50 nm. A metal catalyst was then vacuum-deposited on the CNT layer, and secondary thin CNTs with diameter of 3 – 10 nm were formed from the catalyst particles attached to the surface of primary CNTs by thermal-CVD. The field emission from the CNT layer with the secondary CNTs showed an improvement in the uniformity of the emission current distribution. The developed CNT emitter was applied to high-resolution CNT-FED. The sub-pixel size was 0.2mm × 0.6mm.

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