Abstract
TFTs with zinc oxynitride (ZnON) as active layer were developed, and a saturation mobility over 50 cm2/Vs was achieved. The ZnON TFTs show superior I‐V performance and Vth uniformity. A 14 inch WOLED panel driven by ZnON TFT was demonstrated. The reliability of ZnON panels was evaluated at high‐temperatureoperation and low‐temperature‐operation conditions, and satisfied results were achieved.
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