Abstract
The recursive mirror comprised of dozens of re-entrant pyramids as large as about 300 μm in length is applicable to the optical measurement of soundness of structures. To make such a micro shape directly on a stainless steel substrate, the structures with a mirror device may be able to be used for many applications under special circumstances, such as high pressure, high temperature, and radiation fields. To improve processing accuracy in the microfabrication of microprisms by near-infrared short-pulse irradiation, we introduced an in-situ observation apparatus and finishing processes. As a result, a three-dimensional structure was constructed from three layered triangles with about 420 μm in width and about 56 μm in depth. Although the re-entrant pyramid structure with smooth surfaces was achieved after the finishing process, it is necessary to improve the surface roughness with a reflectivity of a few percent or more, for practical use.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
