Abstract
We developed a 50 GB dual layer read only memory (ROM) disc made by electron beam recorder (EBR) recording. The practical recording velocity was realized by control of the recording pulse and the adjustment of the post exposure bake (PEB) condition of the chemically amplified resist. An applicable replication process of dual layer ROM disc to production was realized. The recording condition was optimized for each layer. A sufficient jitter value was obtained from each layer.
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