Abstract
A variable vacuum capacitor (VVC) is used to match impedance between an RF generator and a plasma load for manufacturing semiconductor devices and display panels. However, VVC requires a very narrow gap between electrodes and a high degree of vacuum to implement high dielectric strength and capacitance variability at compact sizes. In addition, it is difficult to manufacture and maintain quality of the electrode unit, and is not easy to access to development due to the difficulty of the brazing process. For this reason, there are no VVC manufacturers in Korea yet, so it relies entirely on imports.<BR>In this study, we designed and manufactured VVC with AC withstand voltage of 12 ㎸ and capacitance of 50 to 500 ㎊, which are widely used in RF matchers, etc. As a result of the test, the required performance was confirmed, and the possibility of localization was verified.
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