Abstract

The spectrum of ten times ionized xenon, Xe XI, was observed in the region 105–157 Å with a low-inductance vacuum spark and a 10.7 m grazing-incidence spectrograph. About 200 lines belonging to the 4d8–(4d75p + 4d74f + 4p54d9) transition array were observed. 140 of these lines are in the region 130–140 Å, which is of importance for extreme ultraviolet (EUV) lithography. The spectrum was interpreted by means of Hartree–Fock calculations and orthogonal parameters using scaling factors for the energy parameters obtained by extrapolation along the Rh II isoelectronic sequence. All 9 levels of the 4d8 configuration and 123 levels of the 4d75p + 4d74f + 4p54d9 configurations were established. Transition probabilities for all observed lines were calculated with fitted values of the energy parameters. A value of 1847200 ± 1600 cm-1 (229.02 ±0.20 eV) was obtained for the ionization energy.

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