47.3: Plane Source and In-Line Deposition System for OLED Manufacturing

Abstract

Whether the manufacturing of the large-size OLED devices succeeds or not will strongly depend on the concept of a thermal evaporation source. The most important factors in OLED device manufacturing are the organic material utilization and the TACT time. We propose an in-line type equipment for OLED manufacturing using a novel plane evaporation source. The plane source maintains the organic film uniformity at 5% and provides high material utilization of over 60% and the proposed in-line system can achieve in 1 min. TACT time.