Abstract

With the rise of concept “meta‐universe”, VR/AR products get more attention currently. This paper introduces the applied oxide technology in ultra‐high resolution VR products and its future development trend. It was investigated how oxide technology become the choice of ultra‐high resolution due to its transparent property. It was also highly researched how to ensure the device characteristics with short channel through adjustment of process route. In the end, the future trend, such as higher mobility and removal of light shield layer, is simply introduces.

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